Institute of Memory Technology Research and Development

The Institute of Memory Technology Research and Development is engaged in the development of device and circuit technologies for next-generation nonvolatile memory, as well as process and next-generation lithography technology. While exploring new principles of operation and device structures, it is developing new types of memory that are attracting lots of attention as next-generation storage class memory (SCM) and system technology , and so as to cultivate new products and markets. It also researches a state-of-the-art digital transformation technology such as Machine Learning and develops the system foundation and expands it as the “smart factory” to our operations.

We operate four technology development centers for devices, processes, system, and digital transformation. We operate four technology development centers for devices, processes, system, and digital transformation.

Device Technology Research & Development Center

In order to realize the most advanced memory products, it is necessary to develop new memory cell materials, structures, and devices such as transistors to operate peripheral circuits, as well as process integration technology, circuit design technology and TCAD technology.

The Device Technology Research & Development Center develops these technologies and utilizes them to develop next-generation file memory with even higher density or new nonvolatile memories such as storage-class memory. It also develops simulation programs and applies them to actual devices. It creates the concepts of brand-new memories and develops memory circuit design technology based on the concepts and designs prototype products. It also performs fundamental research of materials and structures for new memories that have yet to see the light of day, based on new concepts and physical phenomena, with a 10-year time horizon.

Device Technology Device Technology

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Process Technology Research & Development Center

In order to fabricate the most advanced semiconductor devices, many process steps must be repeated that utilize the most advanced chemistry and physics. The Process Technology Research & Development Center performs R&D of deposition technology of new-material films required for the next-generation memories, new pattering technology such as NGL (next-generation lithography), mask technology, dry or wet etching technology to process new materials, deep holes and complicated structures, low-resistance metal wiring technology for high-speed memories, metrology and analysis technologies for new materials and new structures, manufacturing technology to realize them, and test production of advanced devices.

By establishing the core competence of memory technology by new processes, the Process Technology Research & Development Center aims to create valuable foundation processes, process technology that enhances the competitiveness of memory products, and transfer the process technologies to mass-production engineering departments and factories through horizontal deployment and deep cultivation.

Process Technology Process Technology

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System Technology Research & Development Center

In view of the information explosion, innovation of data-centric computing systems is required in order to handle large amounts of data.

Considering new applications and markets, the System Technology Research & Development Center takes charge of R&D of software, hardware, and system technologies, taking account of leading-edge computing and data processing such as storage computing that utilizes storage systems and near-memory computing. From the system perspective, it researches how to make full use of memories and promotes R&D of fundamental technologies related to storage systems and memory systems incorporating high-value-added, next-generation memories. It is also making a concerted effort to develop application technology of AI and machine learning to support optimized and efficient circuit design or memory manufacturing, hardware technology of deep learning, interface technology that connects devices at ultra-high speed, and AI technology itself.

System Technology System Technology

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Digital Transformation Technology Research & Development Center

The Digital Transformation Technology Research & Development Center researches cutting-edge digital technologies such as machine learning, constructs system platforms, and aims to realize smart factories incorporating cloud, big-data, IoT, and other advanced technologies.
Its targets are device structure and circuit parameter optimization to develop cutting-edge memories, mainly 3D BiCS FLASH™ and centralized control for manufacturing machines and so on.
To meet the global demand for flash memories, it also promotes R&D of sophisticated automatic production systems, absolute yield analysis, and quality control in process.

Digital Transformation Technology Digital Transformation Technology

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